Model 458
UV Energy Analyzer for Steppers
with Computer Interface for Model 358
The microprocessor based Model 458 Exposure Analyzer System accurately profiles exposure energy (dose) to assess the performance of the stepper. It is designed for use with the ASML High Intensity, Canon, Nikon, and Ultratech High Intensity Wafer Steppers. The included SUMS Software provides a uniformity test of exposure intensity, time, and energy. Because SUMS measurements are NIST traceable, SUMS can be used to evaluate how well different steppers are matched for exposure. For 365, 400, 420, and 436 nm wavelengths. Other wavelengths are available. Computer and RS232 cable required for use.
APPLICATION
Perfect for a wide variety of industries
where the precision measurement of UV energy
is essential, the Model 458 is designed
for any application requiring repeatable,
reliable UV measurement.
FEATURES
SOFTWARE FEATURES
SUMS Software enables up to 81 measurements to be saved and displayed including calculation of percent deviation for measured parameters
HARDWARE FEATURES
- Averages up to 9 exposures
- Digital display provides clear, NIST traceable measurements
- Measures Intensity, Time, and Energy
- Records % deviation over a series of exposures
- Probe wavelength display helps prevent errors in setup
- Simple push button operation provides reliable results
- RS 232 output to download and record analyzer measurement results
- Detachable probes to match the spectral response of many photoresists
- Display readings can be frozen
- Front panel reminders prompt the user
- Rugged aluminum case features handle and probe pouch for portability